PROCESSING BATHS AND BUILT-IN COMPONENTS

Our process baths are specially designed for complex rinsing, cleaning and etching processes. The material and equipment are precisely tailored to the chemical requirements and individual specifications of our customers - for maximum process reliability and efficiency.

PROCESS TANKS AND INSTALLATION COMPONENTS FOR CLEANING AND ETCHING TECHNOLOGY

Process tanks are available for the various rinsing, cleaning and etching processes. The material of the process tanks is selected according to thermal and chemical resistance. The process baths are available with a wide range of equipment:

Circulation filtration
Direct / indirect temperature control
Automatic tank filling
Vertical / horizontal substrate movement

Conductivity measurement for ultrapure water
Ultrasonic / megasonic systems
Mechanical or manual lid opening
Cooling lids / cooling attachments

The process tanks and their equipment are assembled individually according to customer-specific requirements. In addition, third-party components, for example for lithography, drying or other processes, can also be integrated.

processing bath with megasonics, chemical supply system, cooling trap and cover with cooling (pneumatically hinged)

Etching bath made of PVDF with loose lids

Automatic handling of substrates

Heated overflow bath made of PTFE with hinged lids

IPA-Dryer

Stainless steel ultrasonic bath with hinged lids

OUR PRODUCTS AT A GLANCE

WET BENCH TECHNOLOGY

Our wet bench equipment is specially designed for the production of microelectronic components and research laboratories and offers individually configured, stable workstations made from high-quality solid materials.

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PROCESSING BATHS AND BUILT-IN COMPONENTS

Our process baths are specially designed for complex rinsing, cleaning and etching processes. The material and equipment are precisely tailored to the chemical requirements and individual specifications of our customers - for maximum process reliability and efficiency.

Learn more
ELECTROPLATING

Electroplating processes are a central component of micro and nanotechnology. We develop our systems individually - with the aim of ensuring the highest coating quality and maximum process reliability.

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LAMINAR FLOW UNITS

Whether in semiconductor production, nanotechnology or microsystems technology - our laminar flow systems create controlled clean areas with the highest air quality. They enable reliable process safety wherever clean conditions are essential.

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CHEMICAL SUPPLY/DISPOSAL

Reliable systems for the supply and disposal of ultra-pure chemicals are essential for precise and reproducible production processes.
Our solutions combine maximum safety with flexible functionality - individually adaptable to your application.

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FUME HOODS

Wherever harmful gases or vapors can occur, arias extraction digestories offer reliable personal protection. Individually configurable and made entirely of plastic - for maximum safety and user comfort.

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OTHER PRODUCTS

Our many years of experience in plant engineering and process integration form the basis for comprehensive system solutions - precisely tailored to your requirements. This results in holistic concepts for clean, safe and efficient production environments.

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SERVICES

In addition to building new, tailor-made systems, we support you with comprehensive services - from modernization to maintenance and repair. This keeps your systems efficient and up to date at all times.

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